Metal–organic chemical vapour deposition of YBCO using a new, stable and volatile barium precursor

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Abstract
A new highly volatile Ba-containing precursor which is thermally stable at 1 atm (101325 Pa) pressure is described. This precursor, which is a bis(β-diketonate) that has only C3F7 as substituent groups and which is coordinated with the polyether tetraglyme, is shown to have reproducible carry-over rates and to give repeatable deposition rates for the chemical vapour deposition (CVD) of highly oriented crystalline BaF2. It has also been shown to be suitable for use in the preparation of superconducting YBCO films. Measurements of thermodynamic and kinetic parameters have been made and are compared with those obtained with other Ba-containing precursors. It is concluded that the new Ba-containing precursor is potentially a very promising material for the preparation of superconducting YBCO films.