Inductive bandwidth enhancement of sub-μm InAlAs-InGaAs MSM photodetectors

Abstract
We report on the inductive bandwidth enhancement of InGaAs metal-semiconductor-metal photodetectors with finger spacings in the sub-/spl mu/m range. For optimized circuit design, the calculated frequency response predicts an improvement of the 3-dB bandwidth by more than a factor of two. A first implementation using InAlAs-InGaAs:Fe MSM detectors with 0.7-/spl mu/m finger spacing results in a 28-GHz bandwidth demonstrating the feasibility of the approach.