Interactions of amorphous alloys with Si substrates and Al overlayers
- 1 April 1986
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 59 (7) , 2416-2421
- https://doi.org/10.1063/1.336343
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
- Phase transformations of alloys on a reactive substrate: Interaction of binary alloys of transition and rare-earth metals with siliconJournal of Applied Physics, 1985
- Failure temperature of amorphous Cu-Ta alloys as diffusion barriers in Al-Si contactsApplied Physics Letters, 1985
- Reaction of amorphous Ni-W and Ni-N-W films with substrate siliconJournal of Applied Physics, 1984
- Barrier layers: Principles and applications in microelectronicsJournal of Vacuum Science & Technology A, 1984
- Stability of amorphous Fe-W alloys in multilayer metallizations on siliconThin Solid Films, 1983
- Solid state reactions of TaW thin films and Si single crystalsVacuum, 1983
- Aluminum-silicon ohmic contact on “shallow” junctionsSolid-State Electronics, 1980
- Phase separation in alloy-Si interactionApplied Physics Letters, 1980
- Silicide formation with Pd-V alloys and bilayersJournal of Applied Physics, 1979
- Solid-phase epitaxial growth of Si mesas from al metallizationApplied Physics Letters, 1973