The effect of substrate connections on charging potentials and current densities
- 13 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Antenna ratio definition for VLSI circuits [plasma etch damage]Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A transient fuse scheme for plasma etch damage detectionPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Quantifying a simple antenna design rulePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Influence of scribe lane structures on wafer potentials and charging damagePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002