Quantifying a simple antenna design rule
- 7 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Antenna ratio definition for VLSI circuits [plasma etch damage]Published by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A new router for reducing "antenna effect" in ASIC designPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Relation between product yield and plasma process induced damagePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Correlation of antenna charging and gate oxide reliabilityJournal of Vacuum Science & Technology A, 1996
- Charge Damage Caused by Electron Shading EffectJapanese Journal of Applied Physics, 1994
- New Phenomena of Charge Damage in Plasma Etching: Heavy Damage Only through Dense-Line AntennaJapanese Journal of Applied Physics, 1993