Excitation frequency effects on rf magnetron sputtering of YBa2Cu3O7−δ thin films
- 1 April 1992
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 7 (4) , 813-818
- https://doi.org/10.1557/jmr.1992.0813
Abstract
No abstract availableKeywords
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