Influence of scattering on MeV He+ channeling in Si overlaid by amorphous films
- 8 November 1971
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 37 (2) , 157-158
- https://doi.org/10.1016/0375-9601(71)90104-6
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Lineshape extraction from MeV He+ backscattering energy spectra: Aluminum oxide on siliconPhysics Letters A, 1971
- Analysis of amorphous layers on silicon by backscattering and channeling effect measurementsSurface Science, 1970
- Analysis of disorder distributions in boron implanted siliconRadiation Effects, 1970
- Channeling Studies in Diamond-Type LatticesPhysical Review B, 1969
- Defect studies in crystals by means of channelingCanadian Journal of Physics, 1968
- Zur Einfach- und Mehrfachstreuung geladener TeilchenZeitschrift für Naturforschung A, 1960