The current understanding of epitaxial CVD silicon doping in the light of modelling and theory development (II). Theoretical foundations and incorporation equations

This publication has 3 references indexed in Scilit:

• Suppression of epitaxial silicon layer doping with boron in the presence of hydrogen chloride
  Crystal Research and Technology, 1987
• Decomposition equilibrium of arsine and low pressure doping of epitaxial CVD silicon
  Crystal Research and Technology, 1985
• Kinetics of the Incorporation of Dopants into Epitaxial CVD Silicon
  Crystal Research and Technology, 1982