Mechanisms of silicon monocrystalline growth from SiH4/H2 at reduced pressures
- 31 March 1983
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 61 (2) , 259-274
- https://doi.org/10.1016/0022-0248(83)90362-7
Abstract
No abstract availableKeywords
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