Lower-Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductively Coupled Silane Plasma

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Abstract
A high-density (1011 cm-3) inductively coupled plasma at low pressure (0.1 Pa) of SiH4 enables the growth of hydrogenated amorphous silicon films of high photoconductivity (10-5 S/cm) at substrate temperatures ( <100 °C) considerably lower than that with a conventional capacitive rf plasma. Such low-pressure high-power discharges were achieved by inserting a loop antenna into a plasma with magnetic multipole confinement. Thus, this type of rf reactor appears to be promising to realize high-speed deposition of large-area a-Si:H films at room temperature.