Bipolar effects in the fabrication of silicon membranes by the anodic etch stop
- 30 September 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 29 (1) , 49-57
- https://doi.org/10.1016/0924-4247(91)80031-j
Abstract
No abstract availableKeywords
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