Clustering of random point defects and yield statistics in VLSI circuit fabrication
- 30 September 1989
- journal article
- research article
- Published by Elsevier in Solid-State Electronics
- Vol. 32 (9) , 807-809
- https://doi.org/10.1016/0038-1101(89)90016-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- On yield, fault distributions, and clustering of particlesIBM Journal of Research and Development, 1986
- The effects of wafer to wafer defect density variations on integrated circuit defect and fault distributionsIBM Journal of Research and Development, 1985
- Comments on “some considerations in the formulation of IC yield statistics”Solid-State Electronics, 1981
- Some considerations in the formulation of IC yield statisticsSolid-State Electronics, 1979
- Modification of Poisson statistics: modeling defects induced by diffusionIEEE Journal of Solid-State Circuits, 1977
- On a composite model to the IC yield problemIEEE Journal of Solid-State Circuits, 1975
- Fault clustering: modeling and observation on experimental LSI chipsIEEE Journal of Solid-State Circuits, 1975
- Analysis on yield of integrated circuits and a new expression for the yieldElectrical Engineering in Japan, 1972