Multiple-angle-of-incidence ellipsometry

This publication has 29 references indexed in Scilit:

• Spectroscopic ellipsometry data analysis: measured versus calculated quantities
  Thin Solid Films, 1998
• Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO_2
  Journal of the Optical Society of America A, 1996
• The effect of long-correlation-length surface roughness on the ellipsometric parameters of reflected light
  Europhysics Letters, 1996
• Use of the biased estimator in the interpretation of spectroscopic ellipsometry data
  Applied Optics, 1991
• Variable wavelength, variable angle ellipsometry including a sensitivities correlation test
  Thin Solid Films, 1986
• Parameter correlation and precision in multiple-angle ellipsometry
  Applied Optics, 1981
• Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometry
  Physical Review B, 1979
• Rough silicon surfaces studied by optical methods
  Surface Science, 1974
• Parameter-Correlation and Computational Considerations in Multiple-Angle Ellipsometry*
  Journal of the Optical Society of America, 1971
• The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films
  Review of Scientific Instruments, 1945