Metalorganic chemical vapor deposition and photoluminescence of nm GaAs doping superlattices

Abstract
Metalorganic chemical vapor deposition of ultrathin doped GaAs multilayer structures is reported. Low-temperature photoluminescence is used as a powerful characterization method. By observing the shift of the effective band gap with varying layer thickness of doping superlattices we demonstrate that highly doped layers which are separated by only 4 nm do not diffuse together during growth.