High resolution reflectivity diffractometer on Station 2.3 (Daresbury Laboratory)
- 1 March 1998
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 69 (3) , 1224-1229
- https://doi.org/10.1063/1.1148754
Abstract
A high resolution reflectivity diffractometer (HRRD) has been recently commissioned on Station 2.3 at the SRS, Daresbury Laboratory. Using the instrument which is x-ray wavelength tunable, the characterization of the interface structure in an ion-assisted deposited Co/Cu multilayer has been carried out. In order to improve the electron density contrast of the sample, we have used an x-ray energy near the Cu K edge of 8.989 keV. By scanning the normal (specular), near normal (off specular), and parallel axes (transverse) of the surface, we have obtained useful reflectivity intensity data. By applying simulations to the data, we have determined a total roughness (rms) of 6.0±0.5 Å with a significant contribution from correlated interfacial roughness (4.2±0.2 Å). Other detailed structural information obtained has successfully demonstrated that the commissioned instrument is a viable tool for reflectivity studies.Keywords
This publication has 16 references indexed in Scilit:
- Simple method for the control of substrate ion fluxes using an unbalanced magnetronJournal of Vacuum Science & Technology A, 1998
- Effect of oxygen incorporation on magnetoresistance in Co/Cu multilayersJournal of Applied Physics, 1994
- Interfacial roughness of sputtered multilayers: Nb/SiPhysical Review B, 1993
- Ion-assisted sputter deposition of molybdenum-silicon multilayersApplied Optics, 1993
- Design and characterization of a compact two-target ultrahigh vacuum magnetron sputter deposition system: Application to the growth of epitaxial Ti1−xAlxN alloys and TiN/Ti1−xAlxN superlatticesJournal of Vacuum Science & Technology A, 1993
- A two-circle powder diffractometer for synchrotron radiation on Station 2.3 at the SRSReview of Scientific Instruments, 1992
- Oscillatory magnetic exchange coupling through thin copper layersPhysical Review Letters, 1991
- A two-circle powder diffractometer for synchrotron radiation with a closed loop encoder feedback systemJournal of Applied Crystallography, 1990
- Anomalous X-ray scattering study of composition profile in Fe/Mn superlattice filmsJournal of Physics F: Metal Physics, 1988
- Multilayers for x-ray opticsPublished by SPIE-Intl Soc Optical Eng ,1985