Microcrystalline Cubic Boron Nitride/Amorphous Hydrogenated Boron Nitride Mixed Phase Thin Films
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Characterization of hydrogenated amorphous boron films prepared by electron cyclotron resonance plasma chemical vapor deposition methodJournal of Applied Physics, 1990
- Preparation, properties and applications of boron nitride thin filmsThin Solid Films, 1988
- Structural and Electronic Characterization of Discharge-Produced Boron NitrideJapanese Journal of Applied Physics, 1983