Improved activation in Si+and P+dually implanted InP
- 1 November 1989
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 4 (11) , 951-954
- https://doi.org/10.1088/0268-1242/4/11/009
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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