Finite-element modelling and characterization of a silicon condenser microphone with a highly perforated backplate
- 4 December 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 39 (3) , 191-200
- https://doi.org/10.1016/0924-4247(93)80219-7
Abstract
No abstract availableKeywords
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