Enhanced Diffusion and Electrical Properties of Ion Implanted Silicon
- 1 January 1971
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- THE LATTICE LOCATION OF BORON IONS IMPLANTED INTO SILICONApplied Physics Letters, 1970
- Enhanced diffusion in ion implanted siliconRadiation Effects, 1970
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