Assembly for micromechanics and LIGA

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Abstract
Micromechanical structures must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries or different materials involved. In this way, a system can be built up of products from various suppliers, which may promote the development of a market for microsystems. In micromechanics, assembly must establish mechanical and fluidic contacts in addition to electrical connections. Assembling single components is relatively expensive. This problem may be overcome if batch processes are conducted. A batch process for LIGA structures was developed which has been used to make microfluidic components by transferring a diaphragm to microstructures.

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