Nanomechanical characterization of multilayered thin film structures for digital micromirror devices

This publication has 20 references indexed in Scilit:

• A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings
  Published by Elsevier ,2002
• Surface oxidation of a Nb(100) single crystal by scanning tunneling microscopy
  Materials Characterization, 2002
• The DMD^TM Projection Display Chip: A MEMS-Based Technology
  MRS Bulletin, 2001
• Comparison study of physical vapor-deposited and chemical vapor-deposited titanium nitride thin films using X-ray photoelectron spectroscopy
  Applied Surface Science, 2000
• Micromechanical properties of amorphous carbon coatings deposited by different deposition techniques
  Thin Solid Films, 1995
• Stress variation with temperature/time and its correlation to film structure and deposition parameters
  Journal of Vacuum Science & Technology A, 1991
• Surface reactivity of titanium–aluminum alloys: Ti₃Al, TiAl, and TiAl₃
  Journal of Vacuum Science & Technology A, 1991
• Effect of residual stress and adhesion on the hardness of copper films deposited on silicon
  Journal of Materials Research, 1990
• Stress-related effects in thin films
  Thin Solid Films, 1989
• Variation of Hardness of Metals with Grain Size
  Nature, 1954