Recent advances in laser processing of microelectronic materials and devices
- 14 October 1988
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 21 (10S) , S23-S27
- https://doi.org/10.1088/0022-3727/21/10s/008
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Direct high-resolution excimer laser photoetchingApplied Physics A, 1984
- Laser microchemical techniques for reversible restructuring of gate-array prototype circuitsIEEE Electron Device Letters, 1984
- Wafer-scale laser pantography: Fabrication of n-metal-oxide-semiconductor transistors and small-scale integrated circuits by direct-write laser-induced pyrolytic reactionsApplied Physics Letters, 1983