Solubility enhancement of metallic impurities in silicon by rapid thermal annealing
- 1 April 1991
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 69 (7) , 3878-3881
- https://doi.org/10.1063/1.348444
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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