Thickness uniformity of gas-phase coatings in narrow channels: II. One-side confined channels
- 22 October 2002
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 35 (21) , 2723-2730
- https://doi.org/10.1088/0022-3727/35/21/306
Abstract
No abstract availableKeywords
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