An industrial CMOS process family adapted for the fabrication of smart silicon sensors

This publication has 8 references indexed in Scilit:

• The electronic nose in Lilliput
  IEEE Spectrum, 1998
• Piezoresistive accelerometer with overload protection and low cross-sensitivity
  Sensors and Actuators A: Physical, 1993
• Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers
  Journal of the Electrochemical Society, 1990
• Vertically structured silicon membrane by electrochemical etching
  Sensors and Actuators A: Physical, 1990
• Study of electrochemical etch-stop for high-precision thickness control of silicon membranes
  IEEE Transactions on Electron Devices, 1989
• CMOS integrated silicon pressure sensor
  IEEE Journal of Solid-State Circuits, 1987
• Smart sensors
  Sensors and Actuators, 1986
• Integrated signal conditioning for silicon pressure sensors
  IEEE Transactions on Electron Devices, 1979