Hydrogen passivation and reactivation of thermal donors in silicon

The dissociation of individual thermal-donor–hydrogen (TD-H) complexes is studied by means of infrared absorption, capacitance-voltage profiling, and deep-level transient spectroscopy. Contrary to earlier reports we determine the following dissociation energies: ${\mathit{E}}_{\mathit{D}}$(TD1-H)=1.90±0.20 eV, ${\mathit{E}}_{\mathit{D}}$(TD2-H)=1.67±0.28 eV, and for a mixture of different TD complexes ${\mathit{E}}_{\mathit{D}}$(ΣTD-H)=1.61±0.15 eV. Our results ask for different core structures for TD1 and TDn with n≥2.