Differences in the damage production of proton implanted GaAs, Ge and Si investigated by temperature dependent dechanneling
- 1 January 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 63 (1-2) , 64-67
- https://doi.org/10.1016/0168-583x(92)95170-v
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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