Fracture toughness of polysilicon MEMS devices
- 1 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 82 (1-3) , 274-280
- https://doi.org/10.1016/s0924-4247(99)00366-0
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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