Heat and strain-sensitive thin-film transducers
- 31 December 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 173-182
- https://doi.org/10.1016/0250-6874(83)85022-7
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- Coupling of interdigital transducer to plate modes in a slotted acoustically-thin membraneIEEE Electron Device Letters, 1983
- A new ZnO-on-Si convolver structureIEEE Electron Device Letters, 1982
- A batch-fabricated silicon thermopile infrared detectorIEEE Transactions on Electron Devices, 1982
- Integrated silicon microbeam PI-FET accelerometerIEEE Transactions on Electron Devices, 1982
- Reactive magnetron sputtering of ZnOJournal of Applied Physics, 1981
- Integrated silicon-PVF2acoustic transducer arraysIEEE Transactions on Electron Devices, 1979
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978
- Acoustic-Wave Detection via a Piezoelectric Field-Effect TransducerApplied Physics Letters, 1972
- Pyroelectricity of zinc oxideSolid State Communications, 1966
- Silicon Diffused-Element Piezoresistive DiaphragmsJournal of Applied Physics, 1962