Passivation analysis of micromechanical silicon structures obtained by electrochemical etch stop
- 1 June 1993
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 37-38, 744-750
- https://doi.org/10.1016/0924-4247(93)80126-2
Abstract
No abstract availableKeywords
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