Mathematical and physical considerations on the spatial resolution in scanning Auger electron microscopy
- 2 February 1983
- journal article
- Published by Elsevier in Surface Science
- Vol. 125 (2) , 335-354
- https://doi.org/10.1016/0039-6028(83)90570-8
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
- The interpretation of the spatial resolution of the scanning Auger electron microscope: A theory/experiment comparisonSurface Science, 1979
- The effect of backscattered electrons on the resolution of scanning Auger microscopySurface Science, 1978
- Edge effect in high-resolution scanning Auger-electron microscopyApplied Physics Letters, 1978
- Monte Carlo calculations of the spatial resolution in a scanning auger electron microscopeSurface Science, 1978
- On the influence of backscattered electrons on the lateral resolution in scanning auger microscopyApplied Physics A, 1977
- Application of Monte Carlo calculation to fundamentals of scanning Auger electron microscopyApplied Physics Letters, 1977
- Scanning auger electron microscopy at 30 nm resolutionPhilosophical Magazine, 1976
- Auger electron spectroscopy at high spatial resolution and nA primary beam currentsJournal of Vacuum Science and Technology, 1975
- High−spatial resolution Auger spectroscopy and Auger integration applicationsJournal of Vacuum Science and Technology, 1975
- Auger Electron Spectroscopy in the Scanning Electron Microscope: Auger Electron ImagesApplied Physics Letters, 1971