Reactive pulsed laser deposition of thin molybdenum- and tungsten-nitride films
- 10 August 2004
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 473 (1) , 16-23
- https://doi.org/10.1016/j.tsf.2004.06.149
Abstract
No abstract availableKeywords
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