Mass spectrometric detection of S2F and S2F2in SF6-18O2RF discharges
- 14 July 1991
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 24 (7) , 1098-1101
- https://doi.org/10.1088/0022-3727/24/7/011
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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