Investigation of amorphous Ni0.60Nb0.40 diffusion barriers
- 1 July 1987
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 150 (2-3) , 245-252
- https://doi.org/10.1016/0040-6090(87)90096-4
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
- Reaction of amorphous Ni-W and Ni-N-W films with substrate siliconJournal of Applied Physics, 1984
- Phase separation and layer sequence reversal during silicide formation with Ni-Cr alloys and Ni-Cr bilayersJournal of Applied Physics, 1984
- Stability of amorphous Fe-W alloys in multilayer metallizations on siliconThin Solid Films, 1983
- Interaction of Pd–Er alloys with siliconJournal of Applied Physics, 1983
- Amorphous thin film diffusion barriers on GaAs and InPThin Solid Films, 1983
- Crystallization in oxygen doped amorphous Cu60Zr40: A metallic glass-ceramic?Acta Metallurgica, 1983
- Metallurgical interactions at metallization-compound semiconductor interfacesThin Solid Films, 1982
- Phase separation in alloy-Si interactionApplied Physics Letters, 1980
- Special aspects of diffusion in thin filmsThin Solid Films, 1975