Channeling implants in silicon crystals
- 31 July 1994
- journal article
- review article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 38 (2) , 105-130
- https://doi.org/10.1016/0254-0584(94)90001-9
Abstract
No abstract availableThis publication has 47 references indexed in Scilit:
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