Ion Implantation Calculations in Two Dimensions Using the Boltzmann Transport Equation
- 1 October 1986
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
- Vol. 5 (4) , 679-684
- https://doi.org/10.1109/tcad.1986.1270237
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
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