Effect of ion bombardment on thin hafnium nitride films
- 1 January 1985
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 123 (4) , 315-323
- https://doi.org/10.1016/0040-6090(85)90006-9
Abstract
No abstract availableThis publication has 16 references indexed in Scilit:
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