Variational method for tensile stress evaluation and application to heavily boron-doped square-shaped silicon diaphragms
- 30 June 1995
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 49 (1-2) , 21-27
- https://doi.org/10.1016/0924-4247(95)01008-o
Abstract
No abstract availableThis publication has 21 references indexed in Scilit:
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