Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering
- 30 October 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 63 (2) , 91-96
- https://doi.org/10.1016/s0924-4247(97)01530-6
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Electrical and reliability characteristics of lead-zirconate-titanate (PZT) ferroelectric thin films for DRAM applicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Substrate temperature and target composition effects on PbTiO3 thin films produced in situ by sputteringJournal of Applied Physics, 1996
- Microelectromechanical systems based on ferroelectric thin filmsMicroelectronic Engineering, 1995
- Laser ablation-deposited PZT thin films for piezoelectric microsensors and microactuatorsIntegrated Ferroelectrics, 1995
- Platinum alloys and iridium bottom electrodes for perovskite based capacitors in dram applicationsIntegrated Ferroelectrics, 1995
- Studies of substrate materials for PZT thin filmsIntegrated Ferroelectrics, 1993
- Bottom electrodes for integrated Pb(Zr, Ti)O3 filmsIntegrated Ferroelectrics, 1992
- Annealing of lead zirconate titanate (65/35) thin films for ultra large scale integration storage dielectric applications: Phase transformation and electrical characteristicsJournal of Electronic Materials, 1992
- Properties of Pb(ZrxTi1−x)O3 thin films prepared by r.f. magnetron sputtering and heat treatmentMaterials Research Bulletin, 1990
- Switching kinetics of lead zirconate titanate submicron thin-film memoriesJournal of Applied Physics, 1988