Platinum as Recombination-Generation Centers in Silicon
- 1 September 1995
- journal article
- research article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (9R) , 4587-4592
- https://doi.org/10.1143/jjap.34.4587
Abstract
The general equations of steady-state lifetime in semiconductors with multiple deep impurity levels are derived based on the recombination theory. From the obtained equations the six capture cross sections of three Pt-induced levels in silicon are experimentally determined. The behaviors of minority carrier lifetime and leakage current in Pt-diffused devices are also discussed. It is found that the minority carrier lifetime is influenced by the three Pt-related levels and that the major contribution to the leakage current arises from the level ofEc-0.52 eV.Keywords
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