Effects of hydrogen dilution of silane/methane gas mixtures on growth and structure of a-Si1−xCx:H alloys
- 1 October 1995
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 96 (1) , 17-21
- https://doi.org/10.1016/0038-1098(95)00377-0
Abstract
No abstract availableKeywords
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