Formation of microcrystallinity in hydrogenated silicon films deposited with a simple modification of the magnetron sputtering method
- 1 January 1991
- journal article
- research article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 10 (24) , 1468-1470
- https://doi.org/10.1007/bf00724408
Abstract
No abstract availableKeywords
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