Determination of Thickness and Ge Content of Strained Si1-xGex Layers on Si Substrate by Two-Wavelength Ellipsometry
- 16 March 1993
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 136 (1) , 131-138
- https://doi.org/10.1002/pssa.2211360116
Abstract
No abstract availableKeywords
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