A review of plasma process studies
- 30 September 1980
- journal article
- review article
- Published by Elsevier in Surface Technology
- Vol. 11 (3) , 145-169
- https://doi.org/10.1016/0376-4583(80)90043-6
Abstract
No abstract availableKeywords
This publication has 28 references indexed in Scilit:
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