A comparison between micromachined pressure sensors using quartz or silicon vibrating beams
- 1 September 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 34 (3) , 201-209
- https://doi.org/10.1016/0924-4247(92)85003-k
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Micromachining of quartz and its application to an acceleration sensorSensors and Actuators A: Physical, 1990
- Excitation and detection of vibrations of micromechanical structures using a dielectric thin filmSensors and Actuators, 1989
- A thermally-excited silicon accelerometerSensors and Actuators, 1989
- A vibrating cantilever magnetic-field sensorSensors and Actuators, 1989
- Optically Powered Silicon Microresonator Pressure SensorSpringer Proceedings in Physics, 1989
- Thermally excited silicon microactuatorsIEEE Transactions on Electron Devices, 1988
- Electrothermally excited silicon beam mechanical resonatorsElectronics Letters, 1987
- Etched silicon vibrating sensorJournal of Physics E: Scientific Instruments, 1984
- Resonant diaphragm pressure measurement system with ZnO on Si excitationSensors and Actuators, 1983
- Der Debye-Sears-Effekt zur Bestimmung der elastischen Konstanten von SiliciumZeitschrift für Naturforschung A, 1970