Molecular composition of films and solid particles polymerized in fluorocarbon plasmas
- 15 January 2001
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 89 (2) , 893-899
- https://doi.org/10.1063/1.1334636
Abstract
In fluorocarbon (C 4 F 8 ) plasmas, formation mechanisms of polymers were investigated by the characterization with x-ray photoelectron spectroscopy(XPS) and gel permeation chromatography (GPC). The molecular compositions of the polymers in the filmsdeposited on the substrate and in the particles formed in the gas phase were elucidated by these chemical analyses. The XPS results showed that the particles were carbon-rich and composed of highly branched molecules in contrast to the film composition. From the GPC measurements, the particles were found to contain ultrahigh mass polymers, whose molecular weights were around 100 000. On the contrary, the depositedfilm contained polymers with molecular weights distributed below 2000, in which oligomers, monomers, and fragmented products were included. Present study suggests that these polymers are involved in the formation of crosslinked networks of the films and the particles via surface reactions, where the crosslinking is enhanced by the ion bombardment.This publication has 22 references indexed in Scilit:
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