Radio frequency ion plating-induced phase transition from h-BN to nanocrystalline c-BN

This publication has 9 references indexed in Scilit:

• Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source
  Applied Physics Letters, 1994
• Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine
  Surface and Coatings Technology, 1993
• Preparation of c-BN containing films by reactive r.f. sputtering
  Diamond and Related Materials, 1993
• Deposition mechanisms for promoting sp3 bonding in diamond-like carbon
  Diamond and Related Materials, 1993
• Influence of sputtering target material on the formation of cubic BN thin films by ion beam enhanced deposition
  Diamond and Related Materials, 1993
• Preparation and characterization of nanocrystalline cubic boron nitride by microwave plasma-enhanced chemical vapor deposition
  Applied Physics Letters, 1991
• Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply
  Thin Solid Films, 1990
• Preparation of Cubic Boron Nitride Films by RF Sputtering
  Japanese Journal of Applied Physics, 1990
• Synthesis of BN films by the plasma CVD with various solids: BH3NH3, H3BO3 and NaBH4
  Surface and Coatings Technology, 1989