Scanning Electron Microscopic Observation of Oxidation-Induced Stacking Faults in Silicon
- 1 September 1980
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 19 (9) , 1591-1602
- https://doi.org/10.1143/jjap.19.1591
Abstract
No abstract availableKeywords
This publication has 17 references indexed in Scilit:
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