The improved performance of GaAs micromachined power sensor microsystem
- 30 August 1999
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 76 (1-3) , 241-246
- https://doi.org/10.1016/s0924-4247(99)00037-0
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Patterning of cantilevers for power sensor microsystemVacuum, 1998
- Thermal simulation and characterization of gaas micromachined power-sensor microsystemsSensors and Actuators A: Physical, 1998
- High-sensitivity microwave power sensor for GaAs-MMICimplementationElectronics Letters, 1996
- The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIEVacuum, 1996
- Monolithic GaAs MESFET power sensor microsystemElectronics Letters, 1995
- Thermal wattmeter with direct power conversionIEEE Transactions on Instrumentation and Measurement, 1995
- Observation of a chemical reaction using a micromechanical sensorChemical Physics Letters, 1994
- Thermoelectric AC power sensor by CMOS technologyIEEE Electron Device Letters, 1992
- Small-size vacuum sensors based on silicon thermopilesSensors and Actuators A: Physical, 1991