A low-voltage actuated micromachined microwave switch using torsion springs and leverage
- 1 January 2000
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Microwave Theory and Techniques
- Vol. 48 (12) , 2540-2545
- https://doi.org/10.1109/22.899010
Abstract
No abstract availableKeywords
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